Process introduction:

(1) In the high-temperature catalytic oxidation process, CH4 and reducing substances in the gas react with O2 and are converted into H2O and CO2.

(2) Further remove O2, CO, H2, CO2, and H2O through physical and chemical adsorption.

(3) After the adsorption reactor is saturated, it can be heated, regenerated and reused.

(4) Multiple towers alternate adsorption and regeneration, and can continuously supply gas.

Application areas:

integrated circuit manufacturing;

Semiconductor, LED, laser, solar photovoltaic industry;

fiber optic industry;

High purity gas analysis;