各种大宗气体纯化器种类
气体 | 纯化工艺 | O2 | H2O | CO | CO2 | H2 | NMHC | CH4 | N2 |
N2 | 催化+吸附(CAT+Absorb) | <1 | <1 | <1 | <1 | <1 | <1 | <1 | - |
N2 | 吸附 (Absorb) | <1 | <1 | <1 | <1 | <1 | <1 | - | - |
H2 | 吸附 (Absorb) | <1 | <1 | <1 | <1 | - | <1 | - | - |
H2 | 吸气(Getter) | <1 | <1 | <1 | <1 | - | <1 | <1 | <1 |
H2 | 吸附+吸气(Absorb+Getter) | <1 | <1 | <1 | <1 | - | <1 | <1 | <1 |
H2 | 钯管 | <1 | <1 | <1 | <1 | - | <1 | <1 | <1 |
O2 | 催化+吸附(CAT+Absorb) | - | <1 | <1 | <1 | <1 | <1 | <1 | - |
He/Ar | 吸附 (Absorb) | <1 | <1 | <1 | <1 | <1 | <1 | - | - |
He/Ar | 吸气(Getter) | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 |
He/Ar | 吸附+吸气(Absorb+Getter) | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 |
气体 | 纯化 工艺 | O2 | H2O | CO | CO2 | H2 | CH4 | Acids | Bases | Refractory compound | Organics |
XCDA | 吸附(Absorb) | - | <1 | - | - | - | - | <1 | <1 | <1 | <1 |
纯化原理
